STRAIN DETECTION ELEMENT, STRAIN DETECTOR, AND STRAIN DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a strain detection element, a strain detector, and a strain detection method, capable of detecting a fine strain with a large gauge factor, and easily adjusting the gauge factor.;SOLUTION: The strain detection element includes a gate electrode, a source electrode, a drain electrode, and a layer formed of a piezoelectric material on which a channel is formed.;COPYRIGHT: (C)2010,JPO&INPIT