LEAK INSPECTION APPARATUS FOR ELECTRONIC COMPONENTS AND LEAK INSPECTION TECHNIQUE OF ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a leak inspection apparatus for electronic components and a leak inspection technique of electronic component capable of implementing, at high speeds and at a moderate price, leak inspection for electronic components such as acceleration sensor and the like.;SOLUTION: The leak inspecting apparatus of an electronic component 200 outputting electric signal predetermined due to bias of an inertia body inside a packaging is a leak inspecting apparatus which is equipped with a power supply device 140 applying operating voltage containing fluctuation component with a predetermined frequency to the electronic component 200, a detecting device 130 detecting output from the electronic component, and an evaluating device 160 comparing the output value acquired from the detecting device and a reference value to determine airtightness of the electronic component.;COPYRIGHT: (C)2010,JPO&INPIT