SERVICE LIFE DEGREE FORECASTING METHOD OF ELECTRONIC COMPONENT OF VACUUM PUMP DEVICE AND VACUUM PUMP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum pump device having a function for appropriately forecasting a service life state and the replacing timing of electronic components such as a semiconductor power switching element and an electrolytic capacitor used for a controller for the motor drive of the vacuum pump device.;SOLUTION: The vacuum pump device is provided with temperature sensors 23-26 for always or regularly measuring surface temperatures of predetermined electronic components used for the controller 4 for motor drive, an elapsed time measuring means for measuring an operation time of the controller 4 for motor drive and a storing means for storing results measured by the temperature sensors 23-26 and the elapsed time measuring means. As for the electronic components of which temperatures are measured, the vacuum pump device has a function for recording the time when a predetermined temperature level state is maintained for each temperature level in the storing means and a function for forecasting the service life degree of the electronic components from the operation time of respective temperature levels recorded in the storing means.;COPYRIGHT: (C)2009,JPO&INPIT