VACUUM PUMP CONNECTING DEVICE CONNECTING VACUUM PUMP TO LENS BARREL OF ELECTRONIC BEAM APPLICATION DEVICE AND METHOD FOR INSTALLING VACUUM PUMP CONNECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent a pump fixing strength from being reduced at the time of rotor lock of a vacuum pump.SOLUTION: A vacuum pump connection device 34 has the first vibration absorption part 36 and the second vibration absorption part 38 connected to an exhaust connection part 24A in such a way that they oppositely face to each other through the exhaust connection part 24A. The first vibration absorbing part 36 is connected to an intake port 28 of a vacuum pump 16A at the second end part 42 of the first vibration absorbing part 36 placed at an opposite side of the first end part 40 of the first vibration absorbing part 36 connected to the exhaust connection part 24A. The first vibration absorbing part 36 and the second vibration absorbing part 38 absorb vibration of the vacuum pump. The first vibration absorbing part 36 and the second vibration absorbing part 38 are resilient bellows 36, 38. A vacuum pump connecting device 34 has a rigid connecting member 46 fixed to the second vibration absorbing part 38 at the second end part 44 of the second vibration absorbing part 38 placed at an opposite side of the first end part 42 of the second vibration absorbing part 38 connected to the exhaust connecting part 24A.