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FOCUS DISPLACEMENT DETECTION DEVICE OF LASER BEAM, AND FOCUS DISPLACEMENT ADJUSTMENT METHOD OF LASER BEAM

机译:激光束的焦点位移检测装置及激光束的焦点位移调整方法

摘要

PROBLEM TO BE SOLVED: To highly accurately detect displacement among focus positions of a plurality of laser beams without raising cost, and to highly accurately control focus positions of the plurality of laser beams.;SOLUTION: A focus displacement detection device is provided with: a reflectance variable object wherein reflectance of a laser beam focused position is changed; a driving means for driving a table setting the reflectance variable object or an optical head so that the focused position of the laser beam is moved in an optical axis direction of the laser beam relatively to the reflectance variable object; a laser beam irradiation means for irradiating the reflectance variable object with a designated laser beam with intensity by which reflectance is changed and irradiating the reflectance variable object with the other laser beam with intensity by which reflectance is not changed; a peak value acquiring means for acquiring a peak value of a signal for adjustment prepared from a photo detection signal of a photodetector of the optical head; and a detection means for detecting the displacement of focus positions between the designated laser beam and the other laser beam based on the acquired peak value.;COPYRIGHT: (C)2009,JPO&INPIT
机译:解决的问题:在不增加成本的情况下高精度地检测多个激光束的焦点位置之间的位移,并高精度地控制多个激光束的焦点位置。反射率可变物体,其中激光束聚焦位置的反射率改变;驱动装置,其用于驱动设置反射率可变物体或光学头的台,以使激光束的聚焦位置相对于反射率可变物体沿激光束的光轴方向移动。激光束照射装置,以使反射率可变的物体照射强度不变的指定激光束,并向另一个反射率不变的强度的激光束照射反射率可变的物体。峰值获取装置,用于获取根据光学头的光检测器的光检测信号准备的用于调节的信号的峰值; COPYRIGHT:(C)2009,JPO&INPIT;和一种检测装置,用于基于获取的峰值检测指定激光束与另一激光束之间的焦点位置的位移。

著录项

  • 公开/公告号JP2009134801A

    专利类型

  • 公开/公告日2009-06-18

    原文格式PDF

  • 申请/专利权人 PULSTEC INDUSTRIAL CO LTD;

    申请/专利号JP20070309306

  • 发明设计人 MARUYAMA YOICHI;

    申请日2007-11-29

  • 分类号G11B7/08;G02B7/28;G11B7/085;G11B7/09;G11B7/135;G11B7/0065;

  • 国家 JP

  • 入库时间 2022-08-21 19:45:03

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