METAL FLUORIDE SINGLE CRYSTALLINE BODY PULLING APPARATUS AND METHOD OF MANUFACTURING METAL FLUORIDE SINGLE CRYSTALLINE BODY USING THE SAME APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus of pulling a single crystal which is easy to manufacture a high grade metal fluoride single crystalline body small in crystal defect such as bubbles or negative crystal by decreasing a fallen material falling down into a raw material molten liquid.;SOLUTION: The single crystal pulling apparatus is provided with a gas flow passage 023 through which a gas flows out of a chamber in the direction of side part above a single crystal pulling chamber surrounded by a ceiling plate 019 and a heat insulating wall 010 arranged between a heater 009 and the chamber 008. As a result, it is extremely suppressed that the metal fluoride gas volatilized from the raw material molten liquid 004 during pulling the single crystal 018 is condensed and solidified on the lower surface of the ceiling plate 019, is peeled off by some reason and falls down into the raw material molten liquid 004.;COPYRIGHT: (C)2009,JPO&INPIT