DEVICE AND METHOD FOR MEASURING CAPACITY VARIATION OF MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a capacity variation measuring device and a capacity variation measuring method of a microstructure for measuring microvolume with a simple measuring circuit.;SOLUTION: The microstructure 1 comprises a fixed section electrode 4 and a movable section electrode 5 that is arranged facing to the fixed section electrode 4 and has a capacitance between it and the fixed section electrode 4. A bias generation circuit 20 applies a bias potential between the fixed section electrode 4 and the movable section electrode 5. A current measurement circuit 30 detects the current flowing between the fixed section electrode 4 and the movable section electrode 5 when the bias potential is applied. A current variation detection discrimination circuit 40, based on the detected variation in current with time, measures the variation in capacitance between the fixed section electrode 4 and the movable section electrode 5.;COPYRIGHT: (C)2009,JPO&INPIT