DEFOCUSING AMOUNT MEASURING METHOD OF TEM (TRANSMISSION ELECTRON MICROSCOPE)

摘要

PROBLEM TO BE SOLVED: To provide a defocusing amount measuring method in which defocusing amount can be stably measured by eliminating image movement which is not caused by electron beam tilting with respect to a defocusing amount measuring method of a TEM.;SOLUTION: In the defocusing amount measuring method, electron beams are irradiated from a certain angle to a test piece on a TEM, and the image is stabilized, then, the electron beams are irradiated on the test piece by the same amount by tilting to an opposite direction to the above electron beam tilting, and when the image is stabilized, the electron beam irradiation image is read by the image imaging means, and the shifting amount of the image is obtained by taking auto-correlation of the electron beam irradiation image, and the defocusing amount is obtained by the shifting amount of the image.;COPYRIGHT: (C)2009,JPO&INPIT