METHOD FOR EVALUATING DISLOCATION OF CRYSTAL, METHOD FOR EVALUATING CRYSTAL GROWTH METHOD, AND CRYSTAL GROWTH METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a method for evaluating dislocation of crystals easily and accurately without destroying the crystals. PSOLUTION: A horizontal intensity distribution curve from an asymmetric diffraction plane of a crystalline sample in a reciprocal space is obtained by irradiating the surface of the crystalline sample with X-rays, and thus dislocation of the crystalline sample is evaluated based on the half-width of the intensity distribution curve. PCOPYRIGHT: (C)2009,JPO&INPIT