How to determine the feasibility of the proposed structure analysis process

摘要

I to provide a method of automatic optimization of the proposed structure analysis process to excite the X-ray from the multilayer structure under the processing conditions of more than one or by using the [challenge] electron beam. How to determine the feasibility of the solution means the proposed structure analysis process. This process is accompanied by electron beam excitation of the X-rays from the multi-layer structure. The method includes the step of generating the predicted X-ray data representing the X-ray excitation response of a multilayer structure according to the processing conditions set for more than one or. X-ray data is generated using the structure data defining the structure and composition of the layers. To determine the feasibility of performing the proposed structure analysis process for the multilayer structure, then, the effect of changing the structure data is given to the X-ray data, feasibility predetermined criterion or more one and analyzed in accordance with. [Selection] Figure Figure 1