STRUCTURE ANALYSIS METHOD OF CRYSTAL GRAIN DISPERSION ORGANIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To analyze in detail the distribution state of each crystal grain in an organic material.;SOLUTION: First of all, a film is formed from an organic material 2 acquired by dispersing crystal grains on the surface of a resin material 1 by using a deposition method, a spin coat method or the like. Then, the organic material 2 surface is embedded with a resin material 3. Thereafter, a sample is sliced until it has the thickness in the range of 30-100 nm. Then, after sample height adjustment, voltage axis adjustment, astigmatism correction adjustment and focus adjustment for observation using a transmission electron microscope are performed in a peripheral domain B of an aimed observation portion A, the aimed observation portion A is moved around the optical axis to thereby perform focus adjustment, and thereby the sliced crystal grain dispersion organic material is observed by using the transmission electron microscope, and the distribution state of the crystal grains, or an atomic arrangement structure in the crystal grain dispersion organic material is analyzed.;COPYRIGHT: (C)2009,JPO&INPIT