METHOD FOR MEASURING ELECTROMAGNETIC FIELD DISTRIBUTION, SCANNING TYPE ELECTROMAGNETIC FIELD SENSOR UNIT, AND SCANNING TYPE ELECTROMAGNETIC FIELD MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic field distribution measuring method for measuring electromagnetic field distributions near a printed circuit board or the like at high speed, a scanning type electromagnetic field sensor unit to be used for this method, and moreover a scanning type electromagnetic field measuring device using this scanning type electromagnetic field sensor unit.;SOLUTION: Scanning in a horizontal direction is performed while causing a detection part arranged approximately vertically to a surface to be inspected to perform bending operation at high speed repeatedly, by forming detecting electrodes on a piezoelectric element by using a semiconductor process, and applying a voltage to both ends of the piezoelectric element. The scanning type electromagnetic field sensor unit in an oblong shape is located approximately vertically to the surface of the object to be inspected, and the other distant end of the unit is grasped so that the detection part is located near the surface of the object to be inspected, to perform scanning which combines the high-speed bending operation to be performed by applying a continuous or intermittent voltage of a desired value from 1 kHz up to 500 kHz to both ends of the piezoelectric element and repeating this, with one-direction coarse operation.;COPYRIGHT: (C)2009,JPO&INPIT