LASER SCRIBING METHOD OF SAPPHIRE SUBSTRATE

摘要

PPROBLEM TO BE SOLVED: To scribe a sapphire substrate using low density laser beam. PSOLUTION: This laser scribing method is to scribe the sapphire substrate using laser beam, i.e. working the bite spot, of the sapphire substrate, into which the laser beam finds its way from outside the area of the sapphire substrate by high-density laser emission with a supersonic Q switch. Then, the scribing operation is performed using a CW laser in a low-density laser emission mode. PCOPYRIGHT: (C)2010,JPO&INPIT