HELIUM LEAK DETECTOR AND ADJUSTMENT METHOD FOR VOLTAGE APPLIED TO CORRECTION ELECTRODE PROVIDED ON THE SAME HELIUM LEAK DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a helium leak detector of high measurement accuracy by preventing detection sensitivity from lowering.;SOLUTION: A correction electrode 18 is provided in a position with ions such as C_mH_n ions heavier than He ions applied thereto. The correction electrode 18 is insulated from an intermediate barrier plate 13, etc. within an analyzer tube 10. The correction electrode 18 is connected to a power supply 111. As to the power supply 111, the voltage value of a voltage applied to the correction electrode 18 is variable. The power supply 111 is used to apply a voltage (of -70 to 0 V, for example) to the correction electrode 18 so as to cancel electrostatic force exerted on a deflection track A by carbon deposited within the analyzer tube 10. This makes it possible to prevent the deflection track A of the He ions from being deformed.;COPYRIGHT: (C)2009,JPO&INPIT