HELIUM LEAK DETECTOR NOZZLE AND HELIUM LEAK DETECTOR SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a helium leak detector nozzle capable of enhancing efficiency of helium gas replacement using a purge gas.;SOLUTION: A helium leak detector nozzle comprises: a gas flow tube body 82 for allowing a replaced helium gas in a helium filled space, which has been replaced using a purge gas, to flow; and a gas introduction tube body 81 that penetrates through a tube of the gas flow tube body 82 to allow the helium gas and the purge gas to flow to be blown into the helium filled space.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT