OBSERVATION APPARATUS, RECIPE SETTING METHOD OF OBSERVATION APPARATUS AND OBSERVATION SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide a recipe setting method which enables even a beginner to analyze existing recipe setting contents without trials and errors and prepare a new recipe in a short time on the basis of an analyzed result in an observation apparatus, and an observation apparatus using the same. PSOLUTION: The observation apparatus provided with a function of observing a sample under a registered observation condition on the basis of the recipe for which the observation condition is registered is mainly characterized by displaying the setting contents of a plurality of setting items in a list form for the plurality of recipes as objects, defining the setting contents with high commonality as initial setting on the basis of the result of analyzing the commonality, and preparing a new recipe. PCOPYRIGHT: (C)2009,JPO&INPIT