APPARATUS FOR MEASURING MASS DEVIATION OF DROPLETS, METHOD FOR MEASURING MASS DEVIATION OF DROPLETS USING THE SAME, PATTERN FORMING SYSTEM USING THE SAME, AND METHOD OF CONTROLLING PATTERN FORMING SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for measuring the mass deviation of droplets capable of measuring the mass deviation of individual droplets ejected from each of a plurality of droplet ejection drivers by measuring the mass deviation of the individual droplets being ejected therefrom in real time, even if each of the droplets has a diameter of a required high accuracy, and a method for measuring the mass deviation of droplets using the same.;SOLUTION: The apparatus for measuring the mass deviation of droplets is comprised of a droplet moving-force provider 230 that provides a plurality of droplets ejected from a plurality of droplet ejection drivers 111-1 with a moving force having a moving direction different from the ejection direction of the plurality of droplets, an ejected-droplet position sensor 210 that obtains the position images of the droplets each individually reflecting the position of each of the plurality of droplets, and a droplet mass-deviation measurer/controller that measures the mass deviation of the plurality of droplets by calculating the disengagement angles of the ejection directions of the plurality of droplets utilizing the position images of the droplets obtained by the ejected-droplet position sensor 210.;COPYRIGHT: (C)2009,JPO&INPIT