Apparatus for measureing drop mass deviation and controlling method of thereof and pattern forming system using thereof and controlling method of pattern forming system using thereof

摘要

The present invention is formed droplet mass deviation measuring device and its liquid mass deviation measurement method and system using the same pattern, and it relates to a control system using the method of pattern formation, an object of the present invention a plurality of liquid discharge unit can be measured in real time from the mass difference of the droplets to be discharged and needs to have high accuracy droplet to be discharged from a plurality of liquid discharge unit to provide a method for the control of the liquid mass deviation measurement device and its mass deviation measurement method and this system, and the pattern formed using the pattern forming system using the same capable of measuring the mass variation, even if having a diameter. Drop mass variation according to the invention for this purpose the measuring device has a plurality of liquid droplet to be discharged from each of a plurality of liquid discharge unit; Wherein the plurality of the plurality of droplet ejection direction and the moving force of the liquid movement force in the other direction separately providing a service; The plurality of droplet position ever sat chulaek position sensing element to obtain the droplet position the image is reflected separately; The SAT chulaek enemy position direction of the plurality of droplet ejection of droplets using the droplet position is obtained in the image sensing member by calculating misorientation include liquid mass deviation measurement control section for measuring the plurality of the droplet mass variation.