PINED LAYER AND TMR SENSOR USING THE SAME, AND METHOD OF MANUFACTURING TMR SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a TMR sensor reduced in RA value and high in MR ratio while noise is reduced.;SOLUTION: A pined layer 20 has a synthetic anti parallel structure composed of AP2/a bonding layer (Ru)/AP1. An AP2 layer 13 (outer pined layer) is formed on the AFM layer 12. An AP1 layer 19 (inner pined layer) has a three-layer structure (a lower layer 16, an intermediate layer 17 and an upper layer 18). Each layer has the magnetic moment in the same direction. The lower layer 16 comprises CoFeB, the intermediate layer 17 comprises an Fe alloy, and the upper layer 18 comprises Co or a Co rich alloy. The MR ratio is 48%. The RA value (less than 2 Ω-μm²) is attained while the uniformity of the RA value is improved and head noise is reduced.;COPYRIGHT: (C)2009,JPO&INPIT