INTER-PROCESS CONVEYING SYSTEM BETWEEN DIFFERENT STORIES

摘要

PROBLEM TO BE SOLVED: To provide an inter-process conveying system between different stories capable of efficiently performing story-to-story conveyance without causing delay in the work by a stacker crane by arranging a story-to-story conveying lifter capable of performing story-to-story conveyance separately from the stacker crane between a storage line and a delivery line inside of a stocker.;SOLUTION: This process-to-process conveying system is structured one in a plurality of stories by arranging stacker cranes S capable of travelling to convey and transfer cassettes K to a predetermined position inside of stockers arranged along the conveyance line and respectively comprising a storage/delivery opening on the conveyance line side thereof, and arranging conveyors C for temporarily storing the cassettes K. A story-to-story conveying lifter 4 capable of conveying cassettes between different stories is arranged separately from the stacker crane S between the storage line L1 and the delivery line L0 for temporarily storage and line-conveyance of the cassettes K inside of the stocker.;COPYRIGHT: (C)2009,JPO&INPIT