SLOW MOTION STAGE, SLOW/COARSE MOTION ACTUATOR DEVICE, AND MAGNETIC HEAD INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mechanism making higher the characteristic frequency of a stage, as to a slow motion stage device.;SOLUTION: This slow motion stage device comprises a substrate, the stage relatively movable with respect to the substrate, and elastic support members elastically supporting the stage with respect to the substrate. The support members are disposed so as to expand or contract along the moving direction of the stage, and are serially disposed along each of two side surfaces of the stage extending along the moving direction of the stage.;COPYRIGHT: (C)2009,JPO&INPIT