ROCKING BODY APPARATUS, METHOD OF MANUFACTURING THE SAME AND OPTICAL EQUIPMENT COMPOSED OF ROCKING BODY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a rocking body apparatus in which natural frequency in torsional direction is selectively varied and easily adjusted to a desired resonance frequency while keeping the dimensions of a movable plate, a method of manufacturing the rocking body apparatus and an optical equipment composed of the rocking body apparatus.;SOLUTION: The rocking body apparatus is provided with the movable plate connected to a supporting part with spring beam structure rockably around a torsional axis, and drives the movable plate around the torsional axis, wherein the beam structure has a recessed part provided with an elastic body for adjusting the spring constant of the beam structure, and the resonance frequency of the movable plate is adjustable by the elastic body provided on the recessed part.;COPYRIGHT: (C)2009,JPO&INPIT