PLANAR LIGHTWAVE CIRCUIT, MANUFACTURING METHOD THEREOF, AND OPTICAL WAVEGUIDE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a PLC and the like which can improve the optical coupling efficiency by coupling an optical element to an optical waveguide part without having a gap.;SOLUTION: The PLC 11 includes an optical waveguide part 20 and an optical element mounting part 90. The optical waveguide part 20 has a lower clad layer 21, a core layer 24, and an upper clad layer 22 formed on a part of a silicon substrate 73 as a substrate. The optical element mounting part 90 has an LD 72, which is to be optically coupled at the optical waveguide end face 27 as an end face of the optical waveguide 20, loaded on the silicon substrate 73. At the optical waveguide end face 27, an end face 21a of the lower clad layer 21 is retreated with respect to an end face 24a of the core layer 24 and an end face 22a of the upper clad layer 22 towards a direction away from the LD 72.;COPYRIGHT: (C)2009,JPO&INPIT