Semiconductor processing equipment, semiconductor processing system and semiconductor processing management method

摘要

PROBLEM TO BE SOLVED: To provide an apparatus, a system and a method for processing a semiconductor in which the cause can be investigated and removed easily in a short time upon occurrence of abnormal data in inspection processing.;SOLUTION: The apparatus for processing a semiconductor comprises a section 22 for processing an objective semiconductor substrate according to its processing conditions, a section 24 for picking up the dynamic image of the semiconductor substrate at the time of processing, a processing control section 26 for making a decision whether the processing results satisfy specified conditions or not by associating the processing conditions, the processing results and the dynamic image from the imaging section for each processing, a section 32 for storing dynamic image information including the associated processing conditions, processing results and dynamic image while distinguishing between normal dynamic image information having processing results satisfying the specified conditions and abnormal dynamic image information having processing results not satisfying the specified conditions, and a section 38 for outputting the abnormal dynamic image information.;COPYRIGHT: (C)2003,JPO