Method for producing a reflective spatial light modulator with a high contrast ratio

摘要

Contrast offered by a spatial light modulator device may be highlighted by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. According to one embodiment, is supported above the ribs integral with the reflecting material defined by gaps in a sacrificial layer, the reflective surface is placed under the hinge-containing layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, well, to further reduce unwanted scattering of incident light even be recessed beneath the reflecting surface, walls separating adjacent pixel regions and thereby enhance contrast. [Selection Figure FIG 16F