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Method of fabricating reflective spatial light modulator having high contrast ratio

机译:具有高对比度的反射型空间光调制器的制造方法

摘要

The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.
机译:通过将非反射元件(例如支柱和可移动铰链)放置在像素的反射表面之后,可以增强空间光调制器设备提供的对比度。根据一个实施例,通过由牺牲层中的间隙限定的反射材料的整体肋,反射表面被悬挂在包含铰链的层之上和之下。根据一个替代实施例,反射表面通过在中间层中形成的间隙(例如氧化物)与下面的铰链分开。在任一实施例中,分隔相邻像素区域的壁可以凹入反射表面下方,以进一步减少入射光的不期望散射,从而增强对比度。

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