Micro hardness measurement method and micro hardness tester

摘要

PROBLEM TO BE SOLVED: To provide a microhardness measuring method optimum for measuring the hardness of a surface layer (thin film), capable of finding easily and precisely the hardness of a sample dominant in elastic deformation, in particular, the sample formed with a hard surface layer on a surface of a soft base material, and capable of calculating the hardness of a sample formed with a hard surface layer of forming only a micro impression.;SOLUTION: This microhardness measuring method for forming the impression by pushing an indenter 6 into the sample 9 formed with the hard surface layer 9b on the base material 9a, to calculate the hardness, includes a loading process for measuring the maximum load L_O loaded to the indenter 6, and the maximum push-in amount _M of the indenter 6 from the surface of the sample 9, an unloading process for measuring a raised amount _B of the indenter 6 from the surface of the sample 9, when a load applied to the indenter 6 comes to zero, a calculation process for calculating am impression depth , based on the maximum push-in amount _M and the raised amount _B, and a hardness computation process for computing the hardness, based on the impression depth and the maximum load L_O.;COPYRIGHT: (C)2008,JPO&INPIT