METHOD AND SYSTEM FOR LOCALLY ANNEALING MICROSTRUCTURE FORMED ON SUBSTRATE AND ELEMENT FORMED THEREBY

摘要

PROBLEM TO BE SOLVED: To achieve trimming at a high throughput by a microstructure.;SOLUTION: Batch-compatible post-fabrication annealing method and system are described in such a manner that they are used to trim a resonance frequency of a mechanical microstructure, particularly a micromechanical structure such as a micromechanical resonator and to enhance a Q factor. The technique involves running a current through the micromechanical structure or through an adjacent microstructure (for example, adjacent resistor) to consume power, heating the structure to a temperature high enough to change the microstructure and/or its material characteristic thereby, and leading to changes in the resonance frequency of the microstructure and in the Q factor. The technique allows the trimming of many microstructures to be carried out simultaneously and conveniently all at once and it is implemented by simply applying a voltage across an anchor 10 part of the micromechanical structure.;COPYRIGHT: (C)2009,JPO&INPIT