Height scanning interference analysis method and apparatus including a phase gap analysis

摘要

In an analytical method for analyzing data interference scan height from the test surface, on the basis of the data, calculates the phase profile and the coherence profile of the test surface, the method, between the coherence profile and phase profile Based on the difference, calculates the experimental phase gap map to remove noise by performing filtering the experimental phase gap map, by using the phase gap map the filtered estimate for the height profile of the test surface to improve.