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The technology which forms the distortion in the silicon based transistor which utilizes the semiconductor layer which includes the atom of high covalent radius and was imbedded

机译:在利用包含高共价半径原子且被嵌入的半导体层的硅基晶体管中形成变形的技术

摘要

It is possible to decrease the risk of the stress relief due to the defect of agglomerate conversion and the lattice of germanium the atomic kind where covalent radius is enlarged, the germanium where for example part is substituted at least, by introducing, mechanism of the very effective distortion is offered. To introduce easily due to the epitaxial growth technology which is based on the tin hydride, it is possible the atomic kind where, radius of tin and the like increases.
机译:通过引入团聚机制,可以降低由于团聚体转化缺陷和锗晶格(共价半径扩大的原子种类,例如至少部分取代了锗的锗)的缺陷而导致应力释放的风险。提供有效的失真。由于基于氢化锡的外延生长技术易于引入,因此有可能是原子种类,其中锡的半径等增加。

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