Radiation-sensitive resin composition, method of forming a patterned insulating film, a flat display device comprising an active matrix substrate and the same, and method of manufacturing the flat panel display

摘要

PPROBLEM TO BE SOLVED: To provide a radiation sensitive composition with which patterned insulative films varying in water repellency are easily formed with high accuracy, a method for forming the patterned insulative films using the composition, a display element using the composition, a flat panel display device, and a method for manufacturing the same. PSOLUTION: The resin composition contains (A) an alkaline soluble polymer component, (B) a 1, 2-quinonediazido compound, and (C) a water repellent siloxane resin at specific ratios. The coating film using the resin composition is subjected to pattern exposure and development in the method for forming the patterned insulative films. The display element and the flat panel display device are provided with interlayer insulating films formed by the resin composition. The method for manufacturing the flat panel display device includes an interlayer insulating film forming step of subjecting the regions formed with conductor layers to the pattern exposure with the exposure energy by which only the surface layer portions are cured in part of these regions and the whole in the thickness direction is cured in another part and a conductor layer forming step of forming the conductor layers by liquid material on the surfaces of the interlayer insulating films. PCOPYRIGHT: (C)2004,JPO