The production mannered null 450 of the high crystal Characteristic surface smooth ceramic thin film which is produced making use of the optical receptible additive by

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a novel high crystalline and surface smoothed ceramic thin film formed using a photosensitive additive by the irradiation with ultraviolet rays.;SOLUTION: The ceramic thin film having improved crystallinity and a smoothed surface by spin-coating a Si(100) substrate with a ceramic precursor solution prepared using a metal alkoxide in which the photosensitive organic material is added, drying and irradiating the thin film before crystallization with ultraviolet rays using a light source emitting light in 300-450 nm wave length region. In this way, the ceramic thin film having improved crystallinity and a smoothed surface is obtained by the irradiation with lower energy ultraviolet rays at a lower temperature. By this technique, the process of the formation of the ceramic thin film is made efficient to contribute the development of a functional integrated material.;COPYRIGHT: (C)2004,JPO&NCIPI