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摘要

PROBLEM TO BE SOLVED: To provide a substrate carrier for reducing facility costs by using a simple mechanism.;SOLUTION: In the substrate carrier for carrying out a substrate 5 carried in along a straight conveyance path L from the upstream side to the downstream side through a working position on the conveyance path L; a work stage 3 that can travel freely by a moving table 2 is arranged between a carry-in stage 4 that is arranged on the conveyance path L, and places a substrate carried onto each upper surface from the upstream side and a carry-out stages 6 for placing a substrate carried out to the downstream side. The substrate 5 on the carry-in stage 4 is carried out to the work stage 3 by a conveyance nib 18A at a first substrate conveyor 11, and the substrate 5 on the work stage 3 is conveyed to the carry-out stage 6 by a conveyance nib 18B in the second substrate conveyor 12 simultaneously driven by the same drive source as the first substrate conveyor 11.;COPYRIGHT: (C)2005,JPO&NCIPI