Method, and the minute machine motion sensor which produce the minute machine motion sensor

摘要

As for this invention, acceleration and angular acceleration, or, you called angular velocity, more accurately, it regards the minute machine motion sensor in regard to the measurement equipment which is used at the time of measuring the physical amount. The territory inside wafer plane surface of the component of the motion sensor by this invention, the dicing being cut off, the 90 is smaller than the territory of the component of the motion sensor which turned. Corresponding to that, as for the component of the motion sensor by this invention, the 90 as for height of the said component which turned, with direction of connecting, it is smaller than thickness of the wafer layered product which is formed by the wafer which is connected. Purpose of this invention, is to offer the production method the minute machine motion sensor being improved, and to offer the minute machine motion sensor, is especially ideal ones in use with solution of the small minute machine motion sensor. Selective figure Figure 3