The Stepper and the accumulation tool which are connected (formation method of the accumulation device and sedimentary layer)

摘要

Topic Offer the Stepper and the accumulation tool which are connected.SolutionsThe Stepper is connected, the hardware which makes the layer of the material accumulate while forming the integrated circuit, therefore, without exposing the wafer to the transport between the tools accumulation, pattern formation and washing are executed, function of three tools in the compound tool is connected. The pattern demarcation material is removed by irradiating ULTRAVIOLET RADIATION light through the mask of the Stepper, until recently baking and development step of method of technology are removed with that. In the same way, washing step of method of technology is removed until recently by the flood lighting of ULTRAVIOLET RADIATION. Selective figure Figure 1