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METHOD OF MANUFACTURING MOLD FOR FORMING FILM, METHOD OF FORMING MAIN POLE LAYER IN PERPENDICULAR MAGNETIC RECORDING HEAD, AND PERPENDICULAR MAGNETIC RECORDING HEAD
METHOD OF MANUFACTURING MOLD FOR FORMING FILM, METHOD OF FORMING MAIN POLE LAYER IN PERPENDICULAR MAGNETIC RECORDING HEAD, AND PERPENDICULAR MAGNETIC RECORDING HEAD
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机译:制造用于形成膜的模具的方法,在垂直磁记录头中形成主极层的方法以及垂直磁记录头
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摘要
PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head with improved writability and a sharper neck transition having a main pole layer including a yoke that has vertical sidewalls and a write pole that has inclined sidewalls.;SOLUTION: An insulation layer mold frame has a negative differential bevel angle dBA by employing a two-mask process. A first photoresist layer is patterned and etched to form a rectangular trench 37 in an insulation layer 31 formed of alumina. A second photoresist layer is patterned into a yoke shape opening that is partially superimposed over the rectangular trench 37. After a second RIE process, the yoke opening adjoins the trench 37 at a neck transition point along each long trench side. The volume of a magnetic material in the yoke adjacent to the neck is thereby maximized. The dimension control of the main pole layer can be conducted independently of ABS positioning errors.;COPYRIGHT: (C)2009,JPO&INPIT
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