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Method for forming the film-forming mold , forming method and perpendicular magnetic recording head of the main magnetic pole layer in the perpendicular magnetic recording head
Method for forming the film-forming mold , forming method and perpendicular magnetic recording head of the main magnetic pole layer in the perpendicular magnetic recording head
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机译:垂直磁记录头中的主磁极层的成膜模具的形成方法,形成方法和垂直磁记录头
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摘要
PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head with improved writability and a sharper neck transition having a main pole layer including a yoke that has vertical sidewalls and a write pole that has inclined sidewalls.;SOLUTION: An insulation layer mold frame has a negative differential bevel angle dBA by employing a two-mask process. A first photoresist layer is patterned and etched to form a rectangular trench 37 in an insulation layer 31 formed of alumina. A second photoresist layer is patterned into a yoke shape opening that is partially superimposed over the rectangular trench 37. After a second RIE process, the yoke opening adjoins the trench 37 at a neck transition point along each long trench side. The volume of a magnetic material in the yoke adjacent to the neck is thereby maximized. The dimension control of the main pole layer can be conducted independently of ABS positioning errors.;COPYRIGHT: (C)2009,JPO&INPIT
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