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The chemical machine grinding service water type dispersing element and chemical machine grinding method, and the kit in order to manufacture the chemical machine grinding service water type dispersing element
The chemical machine grinding service water type dispersing element and chemical machine grinding method, and the kit in order to manufacture the chemical machine grinding service water type dispersing element
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机译:化学机械研磨用水型分散元件和化学机械研磨方法,以及用于制造化学机械研磨用水型分散元件的套件
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摘要
The chemical machine grinding service water type dispersing element, (A) the abrasive grain, (B) organic acid, (C) the water solubility macromolecule, (D) includes the oxidizer, and (E) the water, the description above (C) the water soluble high-molecular weight average molecular weight is 50,000 - 5,000,000.
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