Being the enclosure device of the mounting fluid for liquid enclosure lamp foot, and the enclosure device for the liquid enclosure

摘要

PROBLEM TO BE SOLVED: To make an enclosure device 3 for enclosure liquid for a liquid-enclosed mount compact.;SOLUTION: An opening/closing valve 55 on a deaerating line 34 is set to an opening state, a vacuum pump 39 is actuated to reduce pressure to predetermined pressure in a storage tank 36. The opening/closing valve 55 is then set in a closed state to deaerate enclosure liquid L to be injected into a workpiece W in the storage tank 36 that is sealed. As a nozzle 35 is set in a communicated state to an exhaust line 32, the vacuum pump 39 is actuated to eliminate air in the workpiece W. The nozzle 35 is then changed into a communicated state to an injection line 31, and the deaerated enclosure liquid L in the storage tank 36 is injected into the workpiece W.;COPYRIGHT: (C)2005,JPO&NCIPI