Rotational position control method and apparatus of multi-degree-of-freedom ultrasonic motor

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for controlling the rotational position of a multiple-degree-of-freedom ultrasonic motor by which the construction of an inverse kinetic model and update during operation can be executed by executing the feedback-control for every rotational direction.;SOLUTION: The characteristic constitution means, which has the following sensors and parts, is adopted in a rotational position controller α applied to the multiple-degree-of-freedom ultrasonic motor β, namely, measuring sensors 3a, 3b for measuring a measurement value of a lateral rotation angle and a measurement value of a rotation angle in the inclination direction respectively at any time, target speed calculating parts 4a, 4b for calculating a target angular speed of a lateral rotation target angular speed and a target angular speed of the rotation in the inclination direction, rotation control parts 5a, 5b for calculating a speed control voltage command value for every rotational direction of an AC voltage to be impressed on the basis of the rotation angles measured by the measuring sensors 3a, 3b, the target angular speed calculated by the target speed calculating parts 4a, 4b, and the inverse kinetic model 51 while holding the inverse kinetic model 51, and a rotational direction switching part 6 for outputting the AC voltage to respective piezoelectric elements 1a, 1b, and 1c on the basis of the speed control voltage command value.;COPYRIGHT: (C)2005,JPO&NCIPI