The X-ray analysis apparatus in the grazing emission conditions

摘要

(57) Abstract In order to obtain suitable position resolution vis-a-vis the angular scan of grading radiation x-ray fluorescence (GEXRF), the sample (2) should irradiate with small spot. Because yield of fluorescent radiation becomes low as the result, measurement time relatively becomes long. In order to make this fault lighten, with this invention vertically extending the x-ray mirror (16) for the analysis which possesses the focus belt (22) which is present is proposed vis-a-vis the sample surface (4). Because the focus belt (22) matches PSD (24) in line, all positions of the position perception detector (PSD) correspond with the specified height of the mirror, in addition, specified of the fluorescent radiation also height itself of that mirror for the sample surface correspond to the quadrant angle of elevation Out. You can obtain with satisfactory position resolution and attractive fluorescent radiation yield by irradiating the sample making use of the electron beam which converges.