Production method of super-conductivity thin film material, super-conductivity equipment, and super-conductivity thin film material

摘要

A method of manufacturing a superconducting thin film material includes the step of forming an intermediate layer (2), the step of forming one superconducting layer (3) to be in contact with the intermediate layer (2) and the step of forming another superconducting layer (4) by a vapor phase method to be in contact with the one superconducting layer (3). Between the step of forming the intermediate layer (2) and the step of forming the one superconducting layer (3), the intermediate layer (2) is kept in a reduced water vapor ambient or reduced carbon dioxide ambient or, between the step of forming one superconducting layer (3) and the step of forming another superconducting layer (4), the one superconducting layer (3) is kept in a reduced water vapor ambient or reduced carbon dioxide ambient. Thus, the critical current value can be improved.