On the production mannered null plastic make optical component of the optical component

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a water-repellent film by a vapor deposition method by using a fluorine-containing organic silicon compound having a high boiling point continued from the formation of an antireflection film. SOLUTION: In the method for manufacturing an optical member having a water-repellent thin film, an antireflection film is formed by vapor deposition on a plastic optical member and then the water-repellent thin film is formed by vapor deposition on the antireflection film. The vapor deposition of the water-repellent thin film is carried out by heating and vaporizing a fluorine-containing organic silicon compound under the condition that the temperature of the plastic optical member does not exceed the maximum temperature of the plastic optical member in the preceding vapor deposition for the antireflection film, and then by depositing the vaporized fluorine-containing organic silicon compound on the plastic optical member having the antireflection film. The heating stage includes a first temperature elevation stage to elevate temperature from normal temperature to a specified temperature (1) lower than the vaporization initiating temperature of the fluorine-containing silicon compound and a second temperature elevation stage to elevate temperature from the specified temperature (1) to a specified temperature (2) higher than the vaporization initiating temperature. The temperature elevation rate in the first temperature elevation stage is higher than the temperature elevation rate in the second temperature elevation stage.