Being the fault diagnosis device of the vacuum blower which diagnoses the breakdown

摘要

PROBLEM TO BE SOLVED: To provide a diagnostic system for a vacuum pump for predicting a cause of stop of the vacuum pump in advance and thereby to prevent damage of a semiconductor wafer or the like caused by sudden stop of the vacuum pump.;SOLUTION: The diagnostic system comprises: a state change amount measuring means (sensor group 14) for measuring a state change amount in changing the number of rotations of a rotor of the vacuum pump 11; and a state change amount comparing means (normality/abnormality determination device 15a) comparing a state change amount at normal time with the state change amount measured by the state change amount measuring means. The state change amount comparing means compares the state change amount measured by the state change amount measuring means with the state change amount at the normal time, and when the measured state change amount is larger or smaller than the state change amount at the normal time by a predetermined amount, so as to determine the abnormality. At this time, the normal time means a time point where the vacuum pump is manufactured, its inspection is performed, and the vacuum pump meets the standards.;COPYRIGHT: (C)2005,JPO&NCIPI