Semiconductor device failure analysis, failure analysis method, and failure analysis program

摘要

Disclosed is a semiconductor device reliably and efficiently semiconductor failure analysis apparatus capable of performing the analysis of the failure of, and provides a method, and an analysis program analysis. The apparatus includes a test information acquisition unit 11 for acquiring a failure observed image P2 of a semiconductor device, a layout information acquiring section 12 for acquiring layout information, a failure analyzer 13 for analyzing the failure of the semiconductor device, the analysis results configuring the failure analyzer 10 by the analysis screen display controller 14 for displaying information on the display device 40. Failure analyzer 13, as well as set the analysis region by referring to the failure observed image P2, to extract a net passing the analysis region for a plurality of nets included in the layout of the semiconductor device. [Selection Figure] Figure 1