Vertical and horizontal small angle X-ray scattering apparatus and small angle X-ray scattering measuring method

摘要

Provided is a small-angle X-ray scattering apparatus capable of performing a plurality of X-ray diffraction measurements such as transmission small-angle X-ray diffraction, reflection small-angle X-ray diffraction, and in-plane small-angle X-ray diffraction. X-ray generator 11, optical system 16 that forms X-rays into a predetermined X-ray incident beam, sample holder 120 that mounts a sample to be measured and irradiates the X-ray incident beam, and small-angle scattered X from the sample A vacuum path 17 that passes through the line, and an X-ray detector 18 that detects small-angle scattered X-rays that have passed through the vacuum path. The sample holder is fixed to the support 110, and an X-ray generator, an optical system, A vertical / horizontal small-angle X-ray scattering apparatus that allows a plurality of small-angle X-ray scattering measurements to be performed by attaching a vacuum path and an X-ray detector on the bench 100 and being rotatable about the sample holder.