Equipment and plasma electron density measurement methods and planar resonant element of the plasma electron density measurement

摘要

Planar resonant element 1, which utilizes the resonance of the electromagnetic wave includes a body 10 having a conductive plate and a coaxial cable 20. It has an elongated space 11 having a length L and the width d of a predetermined one end opened to the outer edge of the body 10, body 10 has a second surface 13 and the first antenna surface 12. Conductor outer skin 21 of the coaxial cable 20 is connected at point G in the first surface 12, the core conductor 21 of the coaxial cable 20 is connected at point A to the second surface portion 23 via lead 23. In comparison with the U-shaped linear resonant conventional probes, fabrication and ease, the mechanical strength increases.