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METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE
METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE
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机译:热塑容器表面涂层的微波等离子体沉积方法和装置
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摘要
The deposition of a coating on a thermoplastic container surface using low pressure plasma by excitation of a precursor gas with UHF electromagnetic waves in a circular shaped vacuum cavity receiving the container is provided. It includes dimensioning the cavity with respect to the frequency of the UHF electromagnetic waves so as to obtain a coupling mode generating several electromagnetic fields inside the cavity. In particular a TM 120 coupling mode is provided which generates two central fields (4A, 4B) inside the cavity, whereby two containers can be simultaneously treated in said cavity.
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机译:通过在容纳容器的圆形真空腔中利用UHF电磁波激发前驱气体,利用低压等离子体在热塑性容器表面上沉积涂层。它包括相对于UHF电磁波的频率确定空腔的尺寸,以便获得在空腔内产生几个电磁场的耦合模式。特别是提供了一种TM 120耦合模式,该模式在内部生成两个中心场( 4 B> A Sub> ,4 B> B Sub>)腔,从而可以在所述腔中同时处理两个容器。
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