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METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE
METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE
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机译:热塑容器表面涂层的微波等离子体沉积方法和装置
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摘要
the invention relates to the deposition of a coating on a face of a container (3).thermoplastic material using a low pressure plasmaexcitation of a precursor gas by electromagnetic waves in a uhf (ultra high frequency)(1) in a vacuum chamber of circular receiving container. we.the cavity (1) in relation to the frequency of the uhf electromagnetic wavesin order to obtain a coupling mode with multiple fieldselectromagnetic (em) in the cavity. in particular, we establish a method120, which generates two coupling fields for central (4a, 4b) insidethe cavity, so that we can simultaneously process two containers (3).in said cavity (1).
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