FIELD EFFECT TRANSISTOR-BASED BIOSENSOR WITH INORGANIC FILM, METHOD OF MANUFACTURING THE BIOSENSOR, AND METHOD OF DETECTING BIOMOLECULE USING THE BIOSENSOR

摘要

Provided is a Field-Effect Transistor (FET)-based biosensor including: a substrate; a source and a drain, disposed on the substrate, having opposite polarity to the substrate; a gate, disposed on the substrate, contacting the source and the drain; and an inorganic film capable of binding with a biomolecule, disposed on a surface of the gate. A method of manufacturing the FET-based biosensor and a method of detecting a biomolecule using the FET-based biosensor is also provided. The FET-based biosensor can be manufactured using a semiconductor fabrication process without performing an additional process. Therefore, the inorganic film can be selectively deposited on a surface of a specific gate of a single FET, or on the surfaces of some gates of a plurality of FETs using patterning. Furthermore, the FET-based biosensor can be used to effectively detect trace amounts of a target biomolecule in a sample.